Product Description
Thermal oxide silicon wafers are silicon wafers that have a layer of silicon dioxide (SiO2) formed on them through a process called thermal oxidation. This process involves exposing the wafer to heat and oxidizing agents, such as hydrogen, oxygen, or halogen gas, at high temperatures. The layer can be wet or dry, and can range in thickness from a few angstroms to 20 microns.
Thermal oxide wafers have many applications, including:
- Dielectric material
- MEMS (micro-electromechanical systems) devices
- Barrier on thick-film silicon on insulator wafers
- Chemical mechanical planarization (CMP)
- Researching surface properties of silicon substrates
- MOS and other active device fabrication processes
- Fabrication of integrated circuits (ICs) and microchips
- Masking during doping processes
We can provide diameter 2"-12", oxide film thickness 30-1000nm, can process ultra-thick specifications 1-20um, uniformity <3%, provide detailed film thickness uniformity report, Oxidation method according to the thickness of the choice of wet oxygen or pure kilooxygen (LPCVD) and TEOS (PECVD), whether the leakage or uniformity, cleanliness and other process indicators are in the forefront of the international level, to meet the special needs of high-end customers.
Product Picture


SiBranch offers single-sided and double-sided thermally oxidized silicon wafers to meet a wide range of application needs.
Our standard product is a double-sided oxidized wafer with a uniform silicon dioxide layer on both sides, formed by controlled thermal oxidation of the silicon substrate. However, we also offer single-sided oxidized wafers customized to your specific requirements. These wafers are initially double-sided oxidized wafers, and then a layer of the silicon dioxide layer is selectively removed using a buffered hydrofluoric acid etchant.
This flexible oxide wafer manufacturing approach enables us to supply small batches of single-sided and double-sided oxide wafers. Whether you need wafers for process development, material analysis, or high-volume production, we can provide the exact oxide wafer configuration that fits your application.
Our Quality
Silicon dioxide wafers play an important role as an essential, high-quality dielectric material in modern semiconductors. SiO2's unmatched insulating properties enable complex device geometries and enhanced performance compared to semiconductor metals. The oxide layer also facilitates selective etching and masking operations during nanoscale manufacturing.
In addition to semiconductors, oxide wafers can be integrated into microelectromechanical systems (MEMS) as moisture barriers, structural components, or passivation layers. The quality of our oxide wafers ensures that MEMS engineers can rely on the mechanical resilience of silicon dioxide to create complex mechanical structures and fluidic systems.
For any application that requires reliable silicon dioxide wafers, trust SiBranch's expert engineering and rigorous quality assurance. Contact our customer service team today to discuss how our single- and double-sided oxide wafers can support your next innovation.
Why Choose Us
Our products are sourced exclusively from the world's top five manufacturers and leading domestic factories. Supported by highly skilled domestic and international technical teams and stringent quality control measures.
Our objective is to provide customers with comprehensive one-on-one support, ensuring smooth channels of communication that are professional, timely, and efficient. We offer a low minimum order quantity and guarantee swift delivery within 24 hours.
Factory Show
Our vast inventory consists of 1000+ products, ensuring that customers can place orders for as little as one piece. Our self-owned equipments for dicing & backgrinding, and full cooperation in the global industrial chain enable us prompt shipment to ensure customer one-stop satisfaction and convenience.



Our Certificate
Our company takes pride in the various certifications we have earned, including our patent certificate, ISO9001 certificate, and National High-Tech Enterprise certificate. These certifications represent our dedication to innovation, quality management, and commitment to excellence.
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