Silicon Nitride LPCVD and PECVD

Silicon Nitride LPCVD and PECVD

Sibranch offers a variety of film processing options for your silicon needs. This includes LPCVD nitride, and Sibranch can provide wafers with stoichiometric LPCVD nitride or low stress LPCVD nitride, as well as super low stress LPCVD nitride.
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Description
Technical Parameters
Product Description

 

Sibranch offers a variety of film processing options for your silicon needs. This includes LPCVD nitride, and Sibranch can provide wafers with stoichiometric LPCVD nitride or low stress LPCVD nitride, as well as super low stress LPCVD nitride. We also offer high quality PECVD nitride, Low stress PECVD nitride, and PECVD OxyNitride. Wafer diameter is available from 2″ to 200mm and nitride thickness is available from 100Å to 20,000Å.

Any amount of quantity can be ordered with a minimum batch order of 25 wafers.

 

Types of LPCVD Nitride

 

1. Stoichiometric LPCVD nitride

Film thickness: 100Å – 4500Å on both sides

Film stress: =>800±50 MPa Tensile Stress

 

2. Low stress LPCVD nitride

Film thickness: 100Å – 20,000Å on both sides

Film stress: <250±50 MPa Tensile Stress

 

3. Super low stress LPCVD nitride

Film thickness: 100Å – 20,000Å on both sides

Film stress: <100±50 MPa Tensile Stress

 

Types of PECVD Nitride

 

1. PECVD nitride

Film thickness: 100Å – 5000Å on one side

Film stress: +400±50 MPa Tensile Stress

 

2. Low stress PECVD nitride

Film thickness: 100Å – 20,000Å on one side

Film stress: <250±50 MPa Tensile Stress

 

3. PECVD OxyNitride

Film thickness: 100Å – 20,000Å on one side

Film stress: -400±50 MPa Tensile Stress

 

Can be customized according to customer requirements, single cast, double cast, PECVD, LPCVD, stoichiometric LPCVD and other silicon nitride substrate.

 

Product Picture

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Why Choose Us

 

Our products are sourced exclusively from the world's top five manufacturers and leading domestic factories. Supported by highly skilled domestic and international technical teams and stringent quality control measures.

Our objective is to provide customers with comprehensive one-on-one support, ensuring smooth channels of communication that are professional, timely, and efficient. We offer a low minimum order quantity and guarantee swift delivery within 24 hours.

 

Factory Show

 

Our vast inventory consists of 1000+ products, ensuring that customers can place orders for as little as one piece. Our self-owned equipments for dicing & backgrinding, and full cooperation in the global industrial chain enable us prompt shipment to ensure customer one-stop satisfaction and convenience.

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Our Certificate

 

Our company takes pride in the various certifications we have earned, including our patent certificate, ISO9001 certificate, and National High-Tech Enterprise certificate. These certifications represent our dedication to innovation, quality management, and commitment to excellence.

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